Invention Grant
- Patent Title: Information processing device, program, process treatment executing device, and information processing system
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Application No.: US17646023Application Date: 2021-12-27
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Publication No.: US11619926B2Publication Date: 2023-04-04
- Inventor: Hironori Moki , Takahiko Kato
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JPJP2018-021058 20180208
- Main IPC: G05B19/4155
- IPC: G05B19/4155 ; G05B19/418

Abstract:
An information processing device includes: a recording means storing model data that reproduces a change of a workpiece, the model data being constructed, as an effect of process treatment, from differential data between initial state data and end state data of the workpiece, the end state data representing state of the workpiece to which the process treatment is applied under a predetermined process condition; an input receiving means for receiving an input of the initial state data and target end state data of the workpiece; a predicting means for predicting the end state data from the received initial state data, by using the model data and a combination of multiple model data in the recording means; and a determining means for determining a process condition of process treatment to be applied to the workpiece, based on a proximity between the predicted end state data and the target end state data.
Public/Granted literature
Information query
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