Invention Grant
- Patent Title: Method and apparatus for removing particles from the surface of a semiconductor wafer
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Application No.: US17541953Application Date: 2021-12-03
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Publication No.: US11621175B1Publication Date: 2023-04-04
- Inventor: David Alex Rose , Kurt A. Schroder
- Applicant: NCC NANO, LLC
- Applicant Address: US TX Dallas
- Assignee: NCC NANO, LLC
- Current Assignee: NCC NANO, LLC
- Current Assignee Address: US TX Dallas
- Agency: Russell Ng PLLC
- Agent Antony P. Ng
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B7/00

Abstract:
A method for removing particles from a semiconductor wafer surface is disclosed. A wafer is being spun on a spin coater contained within a condensing environment. Liquid vapor is then infused into the condensing environment to allow some of the liquid vapor to be condensed onto a surface of the wafer on which particles may adhere while the wafer is being spun. Next, a set of light pulses is applied to the surface of the spinning wafer. Finally, an electric grid is utilized to remove the particles off the surface of the wafer.
Information query
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