Invention Grant
- Patent Title: Semiconductor structure implementing series-connected transistor and resistor and method for forming the same
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Application No.: US17477051Application Date: 2021-09-16
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Publication No.: US11621198B2Publication Date: 2023-04-04
- Inventor: Ching-Cheng Chuang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/08 ; H01L29/06 ; H01L21/762

Abstract:
A semiconductor structure includes an isolation structure disposed in a semiconductor substrate; a gate electrode and a resistor electrode disposed in the semiconductor substrate, wherein the isolation structure is disposed between the gate electrode and the resistor electrode, and the isolation structure is closer to the resistor electrode than the gate electrode. A source/drain (S/D) region is disposed in the semiconductor substrate and between the gate electrode and the isolation structure, wherein the S/D region is electrically connected to the resistor electrode. A conductive structure is disposed in the semiconductor structure and over the isolation structure, wherein the S/D region is electrically connected to the resistor electrode through the conductive structure.
Public/Granted literature
Information query
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