Invention Grant
- Patent Title: Laser beam spot shape correcting method
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Application No.: US17113548Application Date: 2020-12-07
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Publication No.: US11621201B2Publication Date: 2023-04-04
- Inventor: Atsushi Ueki , Teppei Nomura
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2019-224048 20191211
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; G02B19/00 ; G02B27/09 ; G02B27/00 ; G02B5/10 ; H01L21/268 ; H01L21/78 ; B23K26/03 ; B23K26/073 ; B23K26/53 ; B23K103/00 ; G02F1/1362

Abstract:
A laser beam spot shape correcting method includes a laser beam irradiating step of irradiating a concave mirror with a laser beam, an imaging step of imaging reflected light by a beam profiler, an image forming step of forming an XZ plane image or a YZ plane image from an XY plane image imaged in the imaging step, and a comparing step of comparing the image formed in the image forming step with an XZ plane image or a YZ plane image of an ideal laser beam. A phase pattern displayed on a display unit of a spatial light modulator is changed such that the XZ plane image or the YZ plane image formed in the image forming step coincides with the XZ plane image or the YZ plane image of the ideal laser beam.
Public/Granted literature
- US20210183714A1 LASER BEAM SPOT SHAPE CORRECTING METHOD Public/Granted day:2021-06-17
Information query
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