Invention Grant
- Patent Title: Electrical fuse matrix
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Application No.: US17013644Application Date: 2020-09-06
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Publication No.: US11621225B2Publication Date: 2023-04-04
- Inventor: Hsih-Yang Chiu
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: CKC & Partners Co., LLC
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L27/08 ; H01L21/02

Abstract:
An electrical fuse matrix includes a plurality of anti-fuse structures, a plurality of top metal plates, and a plurality of bottom metal plates. The anti-fuse structures are arranged in a matrix, and each of the anti-fuse structure includes a top conductive structure, a bottom conductive structure, and a dielectric film disposed between the top conductive structure and the bottom conductive structure. The anti-fuse structure has an hourglass shape. The top metal plates are disposed on the top conductive structures. The bottom metal plates are disposed on the bottom conductive structures.
Public/Granted literature
- US20220077057A1 ELECTRICAL FUSE MATRIX Public/Granted day:2022-03-10
Information query
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