Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US17020438Application Date: 2020-09-14
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Publication No.: US11621239B2Publication Date: 2023-04-04
- Inventor: Yoshihiro Uozumi
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-170519 20190919
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L23/00 ; H01L21/78

Abstract:
A semiconductor device according to an embodiment includes: a bonding substrate which includes a first chip forming portion having first metal pads provided at a semiconductor substrate and a first circuit connected to the first metal pads, and a second chip forming portion having second metal pads joined to the first metal pads and a second circuit connected to the second metal pads and being bonded to the first chip forming portion; and an insulating film which is filled into a non-bonded region between the first chip forming portion and the second chip forming portion at an outer peripheral portion of the bonding substrate. At least a part of the insulating film contains at least one selected from the group consisting of silicon nitride and nitrogen-containing silicon carbide.
Public/Granted literature
- US11581277B2 Semiconductor device and method for manufacturing the same Public/Granted day:2023-02-14
Information query
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