Invention Grant
- Patent Title: Bonding element and method for manufacturing the same
-
Application No.: US17477996Application Date: 2021-09-17
-
Publication No.: US11621241B2Publication Date: 2023-04-04
- Inventor: Han-Wen Hu , Demin Liu , Yi-Chieh Tsai , Kuan-Neng Chen
- Applicant: NATIONAL YANG MING CHIAO TUNG UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL YANG MING CHIAO TUNG UNIVERSITY
- Current Assignee: NATIONAL YANG MING CHIAO TUNG UNIVERSITY
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW110127041 20210722
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/48 ; H01L23/00

Abstract:
A bonding element and a method for manufacturing the same thereof are provide, wherein the method comprises the following steps: providing a carrier substrate; forming a first metal layer on the carrier substrate; forming a first insulating layer on the first metal layer, wherein the first insulating layer includes a first through hole; forming a first passivation layer and a first conductive layer in the first through hole, wherein the first passivation layer and the first conductive layer in the first through hole form a first connecting bump; forming a first substrate on the first connection bump and the first insulating layer; removing the carrier substrate and the first metal layer to form a first sub-bonding element; and connecting the first sub-bonding element and a second sub-bonding element with a surface of the first passivation of the first connection bump to form the bonding element.
Public/Granted literature
- US20230025936A1 BONDING ELEMENT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2023-01-26
Information query
IPC分类: