Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US16915148Application Date: 2020-06-29
-
Publication No.: US11621272B2Publication Date: 2023-04-04
- Inventor: Jae Taek Kim , Hye Yeong Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0085769 20190716
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L27/11582

Abstract:
The present technology relates to a semiconductor memory device. The semiconductor memory device includes a plurality of channel plugs disposed in a cell region of a semiconductor substrate, a first dummy region and a second dummy region disposed at both end portions of the cell region, and first dummy plugs disposed in the first dummy region and second dummy plugs disposed in the second dummy region. A critical value of the first dummy plugs arranged in the first dummy region is different from a critical value of the second dummy plugs disposed in the second dummy region.
Public/Granted literature
- US20210020647A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-01-21
Information query
IPC分类: