Semiconductor device, image pickup device, and method for manufacturing semiconductor device
Abstract:
To provide a semiconductor device, an image pickup device, and a method for manufacturing the semiconductor device that reduce wiring capacity by using gaps and maintain mechanical strength and reliability. A semiconductor device including: a multilayered wiring layer in which insulating layers and diffusion preventing layers are alternately laminated and a wiring layer is provided inside; a through-hole that is provided to penetrate through at least one or more insulating layers from one surface of the multilayered wiring layer and has an inside covered with a protective side wall; and a gap that is provided in at least one or more insulating layers immediately below the through-hole.
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