Invention Grant
- Patent Title: Semiconductor device, image pickup device, and method for manufacturing semiconductor device
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Application No.: US17138606Application Date: 2020-12-30
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Publication No.: US11621283B2Publication Date: 2023-04-04
- Inventor: Hiroyuki Kawashima
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Sheridan Ross P.C.
- Priority: JP2016-164878 20160825
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/768 ; H01L23/522 ; H01L23/532

Abstract:
To provide a semiconductor device, an image pickup device, and a method for manufacturing the semiconductor device that reduce wiring capacity by using gaps and maintain mechanical strength and reliability. A semiconductor device including: a multilayered wiring layer in which insulating layers and diffusion preventing layers are alternately laminated and a wiring layer is provided inside; a through-hole that is provided to penetrate through at least one or more insulating layers from one surface of the multilayered wiring layer and has an inside covered with a protective side wall; and a gap that is provided in at least one or more insulating layers immediately below the through-hole.
Public/Granted literature
- US20210118922A1 SEMICONDUCTOR DEVICE, IMAGE PICKUP DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2021-04-22
Information query
IPC分类: