Invention Grant
- Patent Title: Gate contact structure for a transistor device
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Application No.: US16555734Application Date: 2019-08-29
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Publication No.: US11621333B2Publication Date: 2023-04-04
- Inventor: Ruilong Xie , Hao Tang , Cheng Chi , Daniel Chanemougame , Lars W. Liebmann , Mark V. Raymond
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L21/768 ; H01L29/66 ; H01L21/285 ; H01L23/535 ; H01L29/78 ; H01L29/45 ; H01L27/092 ; H01L29/08 ; H01L21/8238

Abstract:
One illustrative transistor device disclosed herein includes, among other things, a gate positioned above a semiconductor substrate, the gate comprising a gate structure, a conductive source/drain metallization structure positioned adjacent the gate, the conductive source/drain metallization structure having a front face, and an insulating spacer that is positioned on and in contact with at least a portion of the front face of the conductive source/drain metallization structure. In this example, the device also includes a gate contact opening that exposes at least a portion of the insulating spacer and a portion of an upper surface of the gate structure and a conductive gate contact structure positioned in the gate contact opening, wherein the conductive gate contact structure contacts at least a portion of the insulating spacer and wherein the conductive gate contact structure is conductively coupled to the gate structure.
Public/Granted literature
- US20190386107A1 GATE CONTACT STRUCTURE FOR A TRANSISTOR DEVICE Public/Granted day:2019-12-19
Information query
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