Invention Grant
- Patent Title: Acoustic wave device
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Application No.: US16566987Application Date: 2019-09-11
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Publication No.: US11621687B2Publication Date: 2023-04-04
- Inventor: Katsuya Daimon , Yasumasa Taniguchi
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2017-057275 20170323
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/25 ; H03H9/00

Abstract:
In an acoustic wave device, an interdigital transducer electrode is disposed on a piezoelectric substrate with a reverse velocity surface having an elliptic shape, and a dielectric film is disposed to cover the interdigital transducer electrode. Assuming an electrode density (%) of the interdigital transducer electrode to be y (%) and a wavelength-normalized film thickness 100h/λ (%) of the interdigital transducer electrode to be x (%), the wavelength-normalized film thickness x of the interdigital transducer electrode takes a value not less than x satisfying y=0.3452x2−6.0964x+36.262 depending on the electrode density of the interdigital transducer electrode.
Public/Granted literature
- US20200007107A1 ACOUSTIC WAVE DEVICE Public/Granted day:2020-01-02
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