Invention Grant
- Patent Title: Low-loss and wide-band acoustic delay lines using Z-cut lithium niobate piezoelectric thin films
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Application No.: US17073083Application Date: 2020-10-16
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Publication No.: US11621689B2Publication Date: 2023-04-04
- Inventor: Ruochen Lu , Tomas Manzaneque Garcia , Yansong Yang , Songbin Gong
- Applicant: Board of Trustees of the University of Illinois
- Applicant Address: US IL Urbana
- Assignee: Board of Trustees of the University of Illinois
- Current Assignee: Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Lowenstein Sandler LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/25 ; H03H9/72 ; H03H9/145 ; H04L5/14

Abstract:
A piezoelectric thin film (PTF) is located above a carrier substrate. The PTF may be Z-cut LiNbO3 thin film adapted to propagate an acoustic wave in at least one of a first mode excited by an electric field oriented in a longitudinal direction along a length of the PTF or a second mode excited by the electric field oriented at least partially in a thickness direction of the PTF. A first interdigitated transducer (IDT) is disposed on a first end of the PTF. The first IDT is to convert a first electromagnetic signal, traveling in the longitudinal direction, into the acoustic wave. A second IDT is disposed on a second end of the PTF with a gap between the second IDT and the first IDT. The second IDT is to convert the acoustic wave into a second electromagnetic signal, and the gap determines a time delay of the acoustic wave.
Public/Granted literature
- US20210119601A1 LOW-LOSS AND WIDE-BAND ACOUSTIC DELAY LINES USING Z-CUT LITHIUM NIOBATE PIEZOELECTRIC THIN FILMS Public/Granted day:2021-04-22
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