Invention Grant
- Patent Title: Elastic wave device
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Application No.: US17868819Application Date: 2022-07-20
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Publication No.: US11621692B2Publication Date: 2023-04-04
- Inventor: Masakazu Mimura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2015-208924 20151023
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/145 ; H03H3/10 ; H03H9/25 ; H03H9/10 ; H01L41/047

Abstract:
An elastic wave device includes an interdigital transducer electrode, a dielectric film, and a frequency adjustment film are disposed on a LiNbO3 substrate. When Euler Angles of the LiNbO3 substrate are within a range of about 0°±5°, within a range of about θ±1.5°, within a range of about 0°±10°, the interdigital transducer electrode includes a main electrode, a film thickness of the main electrode normalized by a wavelength determined in accordance with an electrode finger pitch of the interdigital transducer electrode is denoted as T, and a density ratio of a material of the main electrode to Pt is denoted as r, the film thickness of the main electrode and θ of the Euler Angles satisfy θ=−0.05°/(T/r−0.04)+31.35°.
Public/Granted literature
- US20220360247A1 ELASTIC WAVE DEVICE Public/Granted day:2022-11-10
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