Liquid processing apparatus and liquid processing method
Abstract:
Provided is a liquid processing apparatus and a liquid processing method for reducing a waste amount of a high specific gravity liquid. The liquid processing apparatus includes: a supply pump; a bubble tank including an inflow port, an overflow port, and a return port; a microbubble generator disposed outside the bubble tank; a recovery tank having a recovery port to recover the processing liquid overflown from a first liquid level to the tank; a separation tank including a settling tank connected to the overflow port, and a floating tank connected to the settling tank at a lower portion, and an ejector having a inlet port connected to the supply pump, a suction port connected the suction body, and a discharge port connected to the return port.
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