Invention Grant
- Patent Title: Method for detecting, controlling and automatically compensating pressure in a polishing process
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Application No.: US16094094Application Date: 2017-10-18
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Publication No.: US11623323B2Publication Date: 2023-04-11
- Inventor: Yong Qiang Chen
- Applicant: Tung Hung Automation Investment Limited
- Applicant Address: HK Kowloon
- Assignee: Tung Hung Automation Investment Limited
- Current Assignee: Tung Hung Automation Investment Limited
- Current Assignee Address: HK Kowloon
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: HK16113260.8 20161118
- International Application: PCT/IB2017/056458 WO 20171018
- International Announcement: WO2018/091989 WO 20180524
- Main IPC: B24B49/16
- IPC: B24B49/16 ; B24B49/00

Abstract:
The invention relates to a method for detecting, controlling and automatically compensating pressure in a polishing process, including: detecting a pressure between a polishing wheel and a polished workpiece by a detection shaft or a moment generated on the detection shaft, and outputting the detected pressure or moment to a controller; comparing the detected pressure or moment with a preset pressure or moment and determining whether there is a difference between them; calculating a compensation feeding amount based on the difference and outputting an adjustment signal to an adjustment shaft based on the compensation feeding amount; and moving the adjustment shaft correspondingly based on the adjustment signal so as to drive the polishing wheel or the polished workpiece to move correspondingly to adjust a relative position between the polishing wheel and the polished workpiece so that the difference keeps consistent.
Public/Granted literature
- US20190126433A1 METHOD FOR DETECTING, CONTROLLING AND AUTOMATICALLY COMPENSATING PRESSURE IN A POLISHING PROCESS Public/Granted day:2019-05-02
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