Invention Grant
- Patent Title: Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound
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Application No.: US17312637Application Date: 2019-12-03
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Publication No.: US11623935B2Publication Date: 2023-04-11
- Inventor: Atsushi Sakurai , Masako Hatase , Tomoharu Yoshino , Akihiro Nishida , Atsushi Yamashita
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JPJP2018-235182 20181217
- International Application: PCT/JP2019/047199 WO 20191203
- International Announcement: WO2020/129616 WO 20200625
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C23C16/455 ; C07F7/22

Abstract:
Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including an alkoxide compound represented by the following general formula (1): where R1 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, R2 and R3 each independently represent an alkyl group having 1 to 5 carbon atoms, and z1 represents an integer of from 1 to 3.
Public/Granted literature
Information query
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