Invention Grant
- Patent Title: Thermosetting adhesive sheet and semiconductor device manufacturing method
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Application No.: US15768050Application Date: 2016-12-13
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Publication No.: US11624011B2Publication Date: 2023-04-11
- Inventor: Daichi Mori , Tomoyuki Ishimatsu
- Applicant: DEXERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DEXERIALS CORPORATION
- Current Assignee: DEXERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2015-243649 20151214
- International Application: PCT/JP2016/087090 WO 20161213
- International Announcement: WO2017/104670 WO 20170622
- Main IPC: B32B9/04
- IPC: B32B9/04 ; C09J163/00 ; C09J7/10 ; H01L23/00 ; C09J11/04 ; C09J11/06 ; C09J11/08 ; H01L21/304 ; C09J7/30 ; B32B27/06 ; H01L21/683 ; C08K3/013

Abstract:
A thermosetting adhesive sheet capable of reducing semiconductor wafer warping and chipping and a method for manufacturing a semiconductor device includes a thermosetting adhesive layer formed from a resin composition containing a resin component and a filler, the resin component containing an epoxy compound and a curing agent, a total value obtained by multiplying the reciprocal of epoxy equivalent of the epoxy compound by content of the epoxy compound in the resin component being 1.15E−04 or more, and blending amount of the filler being 50 pts. mass or more with respect to 100 pts. mass of the resin component; the thermosetting adhesive sheet is applied to a ground surface of a semiconductor and cured before dicing.
Public/Granted literature
- US20180320031A1 THERMOSETTING ADHESIVE SHEET AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2018-11-08
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