Invention Grant
- Patent Title: Method and apparatus of monocrystal growth
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Application No.: US17162368Application Date: 2021-01-29
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Publication No.: US11624123B2Publication Date: 2023-04-11
- Inventor: Yan Zhao , Nan Zhang , Weimin Shen , Hanyi Huang
- Applicant: Zing Semiconductor Corporation
- Applicant Address: CN Shanghai
- Assignee: Zing Semiconductor Corporation
- Current Assignee: Zing Semiconductor Corporation
- Current Assignee Address: CN Shanghai
- Agency: Chen Yoshimura LLP
- Priority: CN202011212265.X 20201103
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B15/14

Abstract:
The present invention provides a method and an apparatus of monocrystal growth. The method comprises providing an apparatus comprising a crucible, a first lifting device for lifting the crucible, a deflector tube and a second lifting device for lifting the deflector tube; setting a theoretical distance between the deflector tube and the melt surface, determining a theoretical ratio of the crucible lifting rate relative to the monocrystal lifting rate based on sizes of the crucible and the monocrystal, and starting to grow the monocrystal. During the growth, the position of one or more of the crucible, the deflector tube and the monocrystal is adjusted, the actual distance between the deflector tube and the melt surface is real-time detected, the deviation value between the theoretical and the actual distances is calculated, a variation of the ratio is obtained by the deviation value, and the theoretical ratio is adjusted based on the variation. Based on the variation of the ratio of the crucible lifting rate relative to the monocrystal lifting rate, the speeds of the lifting devices are adjusted to maintain the process lifting rate during the crystal growth without change. The process lifting rate is the lifting rate of the monocrystal ingot relative to the melt surface. The present invention can facilitate to produce the monocrystal with high quality.
Public/Granted literature
- US20220136131A1 METHOD AND APPARATUS OF MONOCRYSTAL GROWTH Public/Granted day:2022-05-05
Information query
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