Invention Grant
- Patent Title: Fluid delivery mounting panel and system
-
Application No.: US17244557Application Date: 2021-04-29
-
Publication No.: US11624450B2Publication Date: 2023-04-11
- Inventor: Sohrab Zokaei , Kiran Garikipati , Shawn Thanhsan Le
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: F16K27/00
- IPC: F16K27/00 ; F16K37/00 ; F15B13/08

Abstract:
An apparatus comprises a mounting panel including a top plate having multiple vias and multiple orifices. An internal face of the top plate includes a first cut-out region and channels through which to flow a process fluid. The first cut-out region can be a reservoir in which to contain the process fluid. The multiple vias are adapted for passing the process fluid through the top plate. The multiple orifices are adapted for attaching a plurality of process fluid control components to the mounting panel. An inner plate also has multiple additional vias. The apparatus includes a bottom plate, where the inner plate is compacted between the top plate and the bottom plate to form an integral metallic body in which to contain and flow the process fluid.
Public/Granted literature
- US20220349489A1 FLUID DELIVERY MOUNTING PANEL AND SYSTEM Public/Granted day:2022-11-03
Information query