Invention Grant
- Patent Title: Shield structure for pressure sensor, and pressure sensor provided with same
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Application No.: US17645174Application Date: 2021-12-20
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Publication No.: US11624671B2Publication Date: 2023-04-11
- Inventor: Kazuya Takimoto , Tatsuya Tanaka , Tomoharu Oba
- Applicant: Saginomiya Seisakusho, Inc.
- Applicant Address: JP Tokyo
- Assignee: Saginomiya Seisakusho, Inc.
- Current Assignee: Saginomiya Seisakusho, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2017-230549 20171130
- Main IPC: G01L19/14
- IPC: G01L19/14 ; G01L19/00 ; G01L19/06

Abstract:
In a pressure sensor, a cap-shaped shielding member (17) to block an electric field undesirable for a signal processing electronic circuit unit of a sensor chip (16) is supported by an end surface of a disk conductive plate (19) between one end surface of the sensor chip (16) in a liquid sealing chamber (13) and a diaphragm (32). The conductive plate (19) is electrically connected via a group of input-output terminals (40ai) and bonding wires (Wi), for example, and the sensor chip (16) is supported by one end portion of a chip mounting member (18) which is electrically connected via the group of input and output terminals (40ai) and the bonding wires (Wi).
Public/Granted literature
- US20220113210A1 SHIELD STRUCTURE FOR PRESSURE SENSOR, AND PRESSURE SENSOR PROVIDED WITH SAME Public/Granted day:2022-04-14
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