Invention Grant
- Patent Title: Optical probe, optical probe array, test system and test method
-
Application No.: US17039878Application Date: 2020-09-30
-
Publication No.: US11624679B2Publication Date: 2023-04-11
- Inventor: Michitaka Okuta , Yuki Saito , Toshinaga Takeya , Shou Harako , Jukiya Fukushi , Minoru Sato , Hisao Narita
- Applicant: Kabushiki Kaisha Nihon Micronics
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee Address: JP Tokyo
- Agency: Lorenz & Kopf, LLP
- Priority: JPJP2019-183669 20191004
- Main IPC: G01M11/02
- IPC: G01M11/02 ; G01R1/073 ; G01R31/26 ; H01S5/00
Abstract:
An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.
Public/Granted literature
- US20210102864A1 OPTICAL PROBE, OPTICAL PROBE ARRAY, TEST SYSTEM AND TEST METHOD Public/Granted day:2021-04-08
Information query
