Invention Grant
- Patent Title: Adhesion defect detection apparatus and adhesion defect detection method using the same
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Application No.: US17403838Application Date: 2021-08-16
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Publication No.: US11624709B2Publication Date: 2023-04-11
- Inventor: Tae Jin Hwang
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2019-0011877 20190130
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/86 ; G02F1/1333 ; H01L51/00
Abstract:
An adhesion defect detection apparatus includes an inspection window having a first dummy area, a second dummy area, and an inspection area disposed between the first dummy area and the second dummy area. A first shape changer is disposed on the inspection window. The first shape changer is configured to change a shape of the inspection window in a first direction. A second shape changer is disposed outside of both the first dummy area and the second dummy area. The second shape changer is configured to change a shape of the inspection window in a second direction that is perpendicular to the first direction.
Public/Granted literature
- US20210372934A1 ADHESION DEFECT DETECTION APPARATUS AND ADHESION DEFECT DETECTION METHOD USING THE SAME Public/Granted day:2021-12-02
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