Invention Grant
- Patent Title: Wide-band multimode interference coupler with arbitrary power splitting ratio and method for making the same
-
Application No.: US17218748Application Date: 2021-03-31
-
Publication No.: US11624873B2Publication Date: 2023-04-11
- Inventor: Hong Cai , Jie Lin
- Applicant: MARVELL ASIA PTE LTD.
- Applicant Address: SG Singapore
- Assignee: MARVELL ASIA PTE LTD.
- Current Assignee: MARVELL ASIA PTE LTD.
- Current Assignee Address: SG Singapore
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/136 ; G02B6/122 ; G02B6/293

Abstract:
A method for making a multimode interference (MMI) coupler with an arbitrary desired splitting ratio includes forming a thin-film of silicon-nitride material overlying a SOI substrate. The method further includes obtaining geometric parameters of a standard MIMI coupler including a rectangular MMI block and one input port and two output ports in taper shape with one of standard splitting ratios under self-imaging principle which is close to the desired splitting ratio. Additionally, the method includes tunning the input port to an off-center position at front edge of the MMI block. The method further includes making a first output port to a first off-center position flushing with a side edge of the MMI block, adjusting a second output port to a second off-center position. The method includes tunning the MMI block to obtain optimized geometric parameters for approaching the selected arbitrary splitting ratio, and etching the thin-film of silicon-nitride material.
Public/Granted literature
Information query