Invention Grant
- Patent Title: Learning device, inference device, and learned model
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Application No.: US17274739Application Date: 2019-08-29
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Publication No.: US11625518B2Publication Date: 2023-04-11
- Inventor: Kosuke Yamamoto , Motoshi Fukudome , Ken Itabashi , Naoshige Fushimi , Kazuyoshi Matsuzaki
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Armstrong Teasdale LLP
- Priority: JPJP2018-171015 20180912
- International Application: PCT/JP2019/033861 WO 20190829
- International Announcement: WO2020/054443 WO 20200319
- Main IPC: G06F30/27
- IPC: G06F30/27 ; G06F119/18 ; G06N3/02

Abstract:
A learning device for performing a machine learning based on a learning model using data input to an input layer, includes: a calculation part configured to calculate a predetermined number of features, in which simulation data as a result of simulating semiconductor manufacturing processes by setting environmental information inside a process vessel in which the semiconductor manufacturing processes are performed and using a predetermined component provided in the process vessel as a variable, and XY coordinates parallel to a plane of a wafer are associated with each other; and an input part configured to input the calculated predetermined number of features to the input layer.
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