Invention Grant
- Patent Title: Processing apparatus
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Application No.: US17152873Application Date: 2021-01-20
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Publication No.: US11626307B2Publication Date: 2023-04-11
- Inventor: Yoshimasa Kojima , Atsushi Kubo
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2020-016992 20200204
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/67 ; B23K26/38 ; H04N7/18 ; H04N5/262 ; H04N23/90

Abstract:
A processing apparatus includes a chuck table including a plate-shaped holding component having a predetermined region transparent from one surface to the other surface, a processing unit that processes a workpiece, a first imaging unit disposed over the chuck table to acquire a normal image of the back surface side, and a second imaging unit disposed under the chuck table to acquire a normal image of the front surface side, a display device, and a control part that executes image processing of the normal image of either the back or front surface side to cause the normal image subjected to the image processing to be displayed on the display device in the state of being inverted in a predetermined direction in order to allow the orientation of the normal image of the back surface side to correspond with the orientation of the normal image of the front surface side.
Public/Granted literature
- US20210242061A1 PROCESSING APPARATUS Public/Granted day:2021-08-05
Information query
IPC分类: