Invention Grant
- Patent Title: Bonding head including a thermal compensator, die bonding apparatus including the same and method of manufacturing semiconductor package using the same
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Application No.: US16837025Application Date: 2020-04-01
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Publication No.: US11626381B2Publication Date: 2023-04-11
- Inventor: Jonggu Lee , Sunghyup Kim , Byungjo Kim , Sanghoon Lee , Sukwon Lee , Sebin Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2019-0120063 20190927
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B29C65/30 ; B29C65/00

Abstract:
A bonding head for a die bonding apparatus and a die bonding apparatus including the bonding head, the bonding head including a head body; a thermal pressurizer mounted on a lower surface of the head body, the thermal pressurizer being configured to hold and heat at least one die and including a heater having a first heating surface that faces a held surface of the die; and a thermal compensator at an outer region of the die, the thermal compensator extending downwardly from the lower surface of the head body and including at least one thermal compensating block having a second heating surface that emits heat from a heating source therein and that faces a side surface of the die held on the thermal pressurizer.
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Information query
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