Invention Grant
- Patent Title: Memory device and forming method thereof
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Application No.: US17806793Application Date: 2022-06-14
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Publication No.: US11626408B2Publication Date: 2023-04-11
- Inventor: Shuai Guo
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN202110966709.7 20210823
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/786 ; H01L29/66 ; H01L21/8234 ; H01L29/423

Abstract:
A memory device and a forming method thereof are provided. The memory device includes: a semiconductor substrate, wherein multiple active regions are formed in the semiconductor substrate, and the multiple active regions are separated by multiple first trenches extending along a first direction and multiple second trenches extending along a second direction; a third trench, extending along the first direction and located in the semiconductor substrate at the bottom of the first trench; a bit line doped region, located in the semiconductor substrate on two sides of the third trench; a gate dielectric layer, located on a sidewall surface of the first trench and a sidewall surface of the second trench; a first dielectric layer that fills the third trench; a metal gate, located in the second trench and the first trench on the first dielectric layer.
Public/Granted literature
- US20230055933A1 MEMORY DEVICE AND FORMING METHOD THEREOF Public/Granted day:2023-02-23
Information query
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