Invention Grant
- Patent Title: Three-dimensional semiconductor memory device and method of fabricating the same
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Application No.: US17113456Application Date: 2020-12-07
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Publication No.: US11626417B2Publication Date: 2023-04-11
- Inventor: Dong-Sik Lee , Byungjin Lee , Sung-Min Hwang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2020-0007787 20200121
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11526 ; H01L27/11573 ; H01L27/11519 ; H01L27/11565

Abstract:
A three-dimensional semiconductor memory device includes a substrate including cell and connection regions. An electrode structure is disposed on the substrate, the electrode structure having a staircase structure on the connection region. A first vertical channel structure and a first dummy structure at least partially penetrate the electrode structure on the cell region and the connection region, respectively. Bottoms of expanded portions of the first vertical channel structure and the first dummy structure are located at first and second levels, respectively. The second level is higher than the first level.
Public/Granted literature
- US20210225871A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-07-22
Information query
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