Invention Grant
- Patent Title: Buried grid with shield in wide band gap material
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Application No.: US17055686Application Date: 2019-05-22
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Publication No.: US11626478B2Publication Date: 2023-04-11
- Inventor: Hossein Elahipanah
- Applicant: ASCATRON AB
- Applicant Address: SE Kista
- Assignee: ASCATRON AB
- Current Assignee: ASCATRON AB
- Current Assignee Address: SE Kista
- Agency: Blank Rome LLP
- Priority: SE1850601-4 20180522
- International Application: PCT/EP2019/063194 WO 20190522
- International Announcement: WO2019/224237 WO 20191128
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/872 ; H01L29/16 ; H01L29/20 ; H01L29/24 ; H01L29/40

Abstract:
There is disclosed a structure in a wide band gap material such as silicon carbide wherein there is a buried grid and shields covering at least one middle point between two adjacent parts of the buried grid, when viewed from above. Advantages of the invention include easy manufacture without extra lithographic steps compared with standard manufacturing process, an improved trade-off between the current conduction and voltage blocking characteristics of a JBSD comprising the structure.
Public/Granted literature
- US20210202695A1 BURIED GRID WITH SHIELD IN WIDE BAND GAP MATERIAL Public/Granted day:2021-07-01
Information query
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