Invention Grant
- Patent Title: Low-leakage regrown GaN p-n junctions for GaN power devices
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Application No.: US17031342Application Date: 2020-09-24
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Publication No.: US11626483B2Publication Date: 2023-04-11
- Inventor: Yuji Zhao , Kai Fu , Houqiang Fu
- Applicant: Yuji Zhao , Kai Fu , Houqiang Fu
- Applicant Address: US AZ Chandler; US AZ Tempe; US AZ Tempe
- Assignee: Yuji Zhao,Kai Fu,Houqiang Fu
- Current Assignee: Yuji Zhao,Kai Fu,Houqiang Fu
- Current Assignee Address: US AZ Chandler; US AZ Tempe; US AZ Tempe
- Agency: Fish & Richardson P.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/30 ; H01L21/02 ; H01L21/306 ; H01L21/324 ; H01L29/20 ; H01L29/872 ; H01L29/808 ; H01L29/735

Abstract:
Fabricating a regrown GaN p-n junction includes depositing a n-GaN layer on a substrate including n+-GaN, etching a surface of the n-GaN layer to yield an etched surface, depositing a p-GaN layer on the etched surface, etching a portion of the n-GaN layer and a portion of the p-GaN layer to yield a mesa opposite the substrate, and passivating a portion of the p-GaN layer around an edge of the mesa. The regrown GaN p-n junction is defined at an interface between the n-GaN layer and the p-GaN layer. The regrown GaN p-n junction includes a substrate, a n-GaN layer on the substrate having an etched surface, a p-GaN layer on the etched surface, a mesa defined by an etched portion of the n-GaN layer and an etched portion of the p-GaN layer, and a passivated portion of the p-GaN layer around an edge of the mesa.
Public/Granted literature
- US20210104603A1 LOW-LEAKAGE REGROWN GAN P-N JUNCTIONS FOR GAN POWER DEVICES Public/Granted day:2021-04-08
Information query
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