Invention Grant
- Patent Title: Cathodic arc ignition device
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Application No.: US17347997Application Date: 2021-06-15
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Publication No.: US11629398B2Publication Date: 2023-04-18
- Inventor: Siegfried Krassnitzer , Juerg Hagmann , Andreas Peter Treuholz , Dominik Erwin Widmer
- Applicant: Oerlikon Surface Solutions AG, Pfäffikon
- Applicant Address: CH Pfäffikon
- Assignee: Oerlikon Surface Solutions AG, Pfäffikon
- Current Assignee: Oerlikon Surface Solutions AG, Pfäffikon
- Current Assignee Address: CH Pfäffikon
- Agency: Bozicevic, Field & Francis LLP
- Agent Michael J. Blessent; Bret E. Field
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/32

Abstract:
An arc ignition device for cathodic arc deposition of a target material onto a substrate, comprising a trigger finger arranged moveable between a contacting position and a resting position, wherein in the contacting position a side surface of an adjacent target can be physically contacted by the trigger finger, and in the resting position the adjacent target cannot be contacted by the trigger finger, wherein during cathodic arc deposition of a target material, the trigger finger is arranged movable between the contacting position and the resting position in such a way that the contamination of the trigger finger with deposited target material during the cathodic arc deposition of the target material can be minimized.
Public/Granted literature
- US20210317567A1 Cathodic Arc Ignition Device Public/Granted day:2021-10-14
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