Invention Grant
- Patent Title: Alternating multi-source vapor transport deposition
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Application No.: US16514004Application Date: 2019-07-17
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Publication No.: US11629405B2Publication Date: 2023-04-18
- Inventor: Vladimir Bulovic , Maximilian Hoerantner
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Foley Hoag LLP
- Agent Dana M. Gordon; Lawrence P. Tardibono
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L51/00 ; C23C16/30 ; H01L51/42

Abstract:
Disclosed are vapor transport deposition systems and methods for alternating sequential vapor transport deposition of multi-component perovskite thin-films. The systems include multiple vaporizing sources that are mechanically or digitally controlled for high throughput deposition. Alternating sequential deposition provides faster sequential deposition, and allows for reduced material degradation due to different vapor temperatures.
Public/Granted literature
- US20200024733A1 ALTERNATING MULTI-SOURCE VAPOR TRANSPORT DEPOSITION Public/Granted day:2020-01-23
Information query
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