Invention Grant
- Patent Title: Measuring method for semiconductor gas sensor based on alternating-current impedance
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Application No.: US17317858Application Date: 2021-05-11
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Publication No.: US11630074B2Publication Date: 2023-04-18
- Inventor: Xiaohua Wang , Dawei Wang , Aijun Yang , Mingzhe Rong , Jianbin Pan , Xianbo Huang , Jifeng Chu , Huan Yuan
- Applicant: XI'AN JIAOTONG UNIVERSITY
- Applicant Address: CN Shaanxi
- Assignee: XI'AN JIAOTONG UNIVERSITY
- Current Assignee: XI'AN JIAOTONG UNIVERSITY
- Current Assignee Address: CN Shaanxi
- Priority: CN2020114160603.3 20201204
- Main IPC: G01N27/22
- IPC: G01N27/22

Abstract:
The present invention discloses a measuring method for a semiconductor gas sensor based on alternating-current impedance. The method includes the steps: connecting the semiconductor gas sensor to a capacitor in parallel, connecting an alternating-current impedance measuring device to the semiconductor gas sensor and the capacitor, combining measuring parameters under measuring frequencies within a first preset range and parallel capacitance values within a second preset range, and measuring a gas with a known concentration according to each of nine features under each combination; traversing all parameter combinations and all the nine features to obtain a plurality of feature values corresponding to the same gas concentration under each feature; and selecting measuring frequencies within a third range, parallel capacitance values within a fourth range and a certain or several of the corresponding features as measuring parameters finally selected for measuring an unknown gas concentration.
Public/Granted literature
- US20220178865A1 MEASURING METHOD FOR SEMICONDUCTOR GAS SENSOR BASED ON ALTERNATING-CURRENT IMPEDANCE Public/Granted day:2022-06-09
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