Invention Grant
- Patent Title: Fabricating a coil above and below a magnetoresistance element
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Application No.: US17648154Application Date: 2022-01-17
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Publication No.: US11630169B1Publication Date: 2023-04-18
- Inventor: Yen Ting Liu , Maxim Klebanov , Paolo Campiglio , Sundar Chetlur , Harianto Wong
- Applicant: Allegro MicroSystems, LLC
- Applicant Address: US NH Manchester
- Assignee: Allegro MicroSystems, LLC
- Current Assignee: Allegro MicroSystems, LLC
- Current Assignee Address: US NH Manchester
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Main IPC: G01R33/09
- IPC: G01R33/09 ; H01F41/12 ; H01F41/04 ; H01F27/28 ; H01F27/32

Abstract:
In one aspect, a method includes forming a metal layer on a substrate, wherein the metal layer comprises a first coil, forming a planarized insulator layer on the metal layer, forming at least one via in the planarized insulator layer, depositing a magnetoresistance (MR) element on the planarized insulator layer, and forming a second coil extending above the MR element. The at least one via electrically connects to the metal layer on one end and to MR element on the other end.
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