Invention Grant
- Patent Title: Ultrafast laser annealing of thin films
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Application No.: US17706810Application Date: 2022-03-29
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Publication No.: US11631593B2Publication Date: 2023-04-18
- Inventor: Marc Currie , Virginia D. Wheeler
- Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
- Applicant Address: US VA Arlington
- Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US VA Arlington
- Agency: US Naval Research Laboratory
- Agent Joslyn Barritt
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/477
Abstract:
A method for locally annealing and crystallizing a thin film by directing ultrashort optical pulses from an ultrafast laser into the film. The ultrashort pulses can selectively produce an annealed pattern and/or activate dopants on the surface or within the film.
Public/Granted literature
- US20220270891A1 Ultrafast Laser Annealing of Thin Films Public/Granted day:2022-08-25
Information query
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