Invention Grant
- Patent Title: Process of realization on a plate of a plurality of chips, each with an individualization area
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Application No.: US17216828Application Date: 2021-03-30
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Publication No.: US11631646B2Publication Date: 2023-04-18
- Inventor: Stefan Landis , Michaël May
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR2003111 20200330
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768

Abstract:
A method for producing a plurality of chips each comprising an individualisation region, each chip comprising at least: a first and a second level of the electrical tracks, and an interconnections level comprising vias. The method includes producing on the dielectric layer covering the first level a mask having openings located in line with the electrical tracks and making the dielectric layer accessible. The method includes producing, in a region of the chip comprising the individualisation region, patterns conformed so that: first openings of the hard mask are not masked by the patterns, and second openings of the hard mask are masked by the patterns. The method includes producing via openings in the dielectric layer in line solely with the first openings. The method further includes filling in the via openings with an electrically conductive material, and producing the second level of the electrical tracks on the vias.
Public/Granted literature
- US20210398917A1 PROCESS OF REALIZATION ON A PLATE OF A PLURALITY OF CHIPS, EACH WITH AN INDIVIDUALIZATION AREA Public/Granted day:2021-12-23
Information query
IPC分类: