Invention Grant
- Patent Title: Ultrasonic bonding apparatus, ultrasonic bonding inspection method and ultrasonically-bonded portion fabrication method
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Application No.: US16478218Application Date: 2018-02-02
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Publication No.: US11631653B2Publication Date: 2023-04-18
- Inventor: Minoru Egusa , Shingo Sudo , Kazuyuki Hashimoto , Erubi Suzuki
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JPJP2017-018138 20170203
- International Application: PCT/JP2018/003605 WO 20180202
- International Announcement: WO2018/143410 WO 20180809
- Main IPC: G01N29/44
- IPC: G01N29/44 ; H01L23/00 ; B23K20/10 ; G01H17/00 ; G01N29/14 ; G01H5/00

Abstract:
An ultrasonic bonding apparatus includes an ultrasonic bonding machine having an ultrasonic tool for applying an ultrasonic wave to a bonding target member mounted on a fixed object fixed to a jig, while pressing a bonding member against the bonding target member; and a bonding inspection apparatus for inspecting a bonding quality of the bonding target member and the bonding member. The bonding inspection apparatus includes: a bonded-state measuring device for detecting a vibration in the jig or a housing of the ultrasonic bonding machine equipped with the jig, to thereby output a detection signal; and a bonded-state determination device for determining, in a bonding process for the bonding target member and the bonding member, a bonded state between the bonding target member and the bonding member on the basis of the detection signal outputted by the bonded-state measuring device.
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