Invention Grant
- Patent Title: Sawing underfill in packaging processes
-
Application No.: US17094161Application Date: 2020-11-10
-
Publication No.: US11631654B2Publication Date: 2023-04-18
- Inventor: Szu-Wei Lu , Ying-Da Wang , Li-Chung Kuo , Jing-Cheng Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L21/78 ; H01L21/56 ; H01L23/31 ; H01L23/00

Abstract:
A method includes bonding a first and a second package component on a top surface of a third package component, and dispensing a polymer. The polymer includes a first portion in a space between the first and the third package components, a second portion in a space between the second and the third package components, and a third portion in a gap between the first and the second package components. A curing step is then performed on the polymer. After the curing step, the third portion of the polymer is sawed to form a trench between the first and the second package components.
Public/Granted literature
- US20210057383A1 Sawing Underfill in Packaging Processes Public/Granted day:2021-02-25
Information query
IPC分类: