Invention Grant
- Patent Title: Semiconductor structure and method for forming same
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Application No.: US17229183Application Date: 2021-04-13
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Publication No.: US11631742B2Publication Date: 2023-04-18
- Inventor: Eric Zhang , Lily Liu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Crowell & Moring, L.L.P.
- Priority: CN202010849880.5 20200821
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/66 ; H01L29/78 ; H01L29/06

Abstract:
A semiconductor structure and a method for forming the same are provided in embodiments of the present disclosure. The forming method includes: providing a base; forming a trench in the base, and forming a first dielectric layer on the bottom surface and side walls of the trench; forming a conductor layer, the conductor layer covering the first dielectric layer on the bottom surface of the trench; forming a second dielectric layer in the trench on the conductor layer; and forming a drift region on a side, provided with the trench, of the base. The forming method can improve the breakdown voltage of an LDMOS device and also reduce the Ron of the LDMOS device, thereby improving the performance of the LDMOS device.
Public/Granted literature
- US20220059664A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME Public/Granted day:2022-02-24
Information query
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