Invention Grant
- Patent Title: Semiconductor structure and forming method thereof
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Application No.: US17313214Application Date: 2021-05-06
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Publication No.: US11631744B2Publication Date: 2023-04-18
- Inventor: Jisong Jin
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Crowell & Moring, L.L.P.
- Priority: CN202011522393.4 20201221
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L27/11 ; H01L27/092 ; H01L29/08 ; H01L29/45 ; H01L29/66 ; H01L21/285 ; H01L21/8238 ; H01L29/78

Abstract:
Disclosed are a semiconductor structure and a forming method thereof. In one form, a forming method includes: providing a base, including a substrate and a plurality of fins protruding from the substrate, an interlayer dielectric layer formed on the substrate, a gate opening formed in the interlayer dielectric layer, the gate opening spanning the fin and exposing a part of a top and a part of a sidewall of the fin, and a source/drain doped region formed in the fins on two sides of the gate opening, where the substrate includes a first region and a second region adjacent to each other, to respectively form transistors, the gate opening located in either of the first region and the second region extends to the other region and exposes the fin of the other region, and a position of the exposed fin of the other region is used as an interconnect position; forming a gate dielectric layer covering a bottom and a sidewall of the gate opening and the fin in the gate opening conformally; removing the gate dielectric layer on a surface of the fin at the interconnect position, to expose the surface of the fin at the interconnect position; and forming a gate structure in the gate opening after the surface of the fin at the interconnect position is exposed. The present disclosure enlarges a process window for electrical connection.
Public/Granted literature
- US20220199791A1 SEMICONDUCTOR STRUCTURE AND FORMING METHOD THEREOF Public/Granted day:2022-06-23
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