Invention Grant
- Patent Title: Integrated thermoelectric devices in Fin FET technology
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Application No.: US17874277Application Date: 2022-07-26
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Publication No.: US11631796B2Publication Date: 2023-04-18
- Inventor: Jhong-Sheng Wang , Jiaw-Ren Shih , Hsiao-Hsuan Hsu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L35/00
- IPC: H01L35/00 ; H01L35/32 ; H01L35/34 ; H01L35/30 ; H01L27/16 ; H01L29/78

Abstract:
Operations for integrating thermoelectric devices in Fin FET technology may be implemented in a semiconductor device having a thermoelectric device. The thermoelectric device includes a substrate and a fin structure disposed on the substrate. The thermoelectric device includes a first connecting layer and a second connecting layer disposed on opposing ends of the fin structure. The thermoelectric device includes a first thermal conductive structure thermally and a second thermal conductive structure thermally coupled to the opposing ends of the fin structure. The fin structure may be configured to transfer heat from one of the first thermal conductive structure or the second thermal conductive structure to the other thermal conductive structure based on a direction of current flow through the fin structure. In this regard, the current flow may be adjusted by a power circuit electrically coupled to the thermoelectric device.
Public/Granted literature
- US20220376159A1 INTEGRATED THERMOELECTRIC DEVICES IN FIN FET TECHNOLOGY Public/Granted day:2022-11-24
Information query
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