Invention Grant
- Patent Title: Electronic device
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Application No.: US17116718Application Date: 2020-12-09
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Publication No.: US11631812B2Publication Date: 2023-04-18
- Inventor: Hwang Yeon Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2018-0114206 20180921
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method of fabricating an electronic device including a semiconductor memory includes forming a first conductive structure extending in a first direction and having a closed-loop shape, forming a second conductive structure extending in a second direction and having a closed-loop shape, the second direction intersecting the first direction, forming a memory cell located at an intersection of the first conductive structure and the second conductive structure, forming first conductive patterns extending in the first direction by etching an end portion of the first conductive structure, forming second conductive patterns extending in the second direction by etching an end portion of the second conductive structure, forming a first protective layer on an etched surface of each of the first conductive patterns and the second conductive patterns, and forming a gap-fill layer on the first protective layer.
Public/Granted literature
- US11716911B2 Electronic device Public/Granted day:2023-08-01
Information query
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