A method and apparatus for forming metal electrode structures, more specifically lithium-containing anodes, high performance electrochemical devices, such as primary and secondary electrochemical devices, including the aforementioned lithium-containing electrodes. In one implementation, the method comprises forming a lithium metal film on a current collector. The current collector comprises copper and/or stainless steel. The method further comprises forming a protective film stack on the lithium metal film, comprising forming a first protective film on the lithium metal film. The first protective film is selected from a bismuth chalcogenide film, a copper chalcogenide film, a tin chalcogenide film, a gallium chalcogenide film, a germanium chalcogenide film, an indium chalcogenide film, a silver chalcogenide film, a dielectric film, a lithium fluoride film, or a combination thereof.