Invention Grant
- Patent Title: Semiconductor memory device having a multilayer dielectric structure with a retracted sidewall below a bit line
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Application No.: US17191712Application Date: 2021-03-04
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Publication No.: US11632887B2Publication Date: 2023-04-18
- Inventor: Chien-Ming Lu , Fu-Che Lee , Feng-Yi Chang
- Applicant: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: TW Hsin-Chu; CN Quanzhou
- Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: TW Hsin-Chu; CN Quanzhou
- Agent Winston Hsu
- Priority: CN201810968333.1 20180823
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
A semiconductor memory device includes a substrate, a dielectric layer, plural bit lines, at least one bit line contact, a spacer structure and a spacer layer. The substrate has an isolation area to define plural active areas. The dielectric layer is disposed on the substrate, and the dielectric layer includes a bottom layer having a sidewall being retracted from sidewalls of other layers of the dielectric layer. The plural bit lines are disposed on the dielectric stacked structure, along a direction, and the at least one bit line contact is disposed below one of the bit lines, within the substrate. The spacer structure is disposed at sidewalls of each of the bit lines, and the spacer layer is disposed on the spacer structure to directly in contact with the spacer structure and the other layers of the dielectric layer.
Public/Granted literature
- US20210193665A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-06-24
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