Invention Grant
- Patent Title: Nanosecond pulser pulse generation
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Application No.: US17142069Application Date: 2021-01-05
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Publication No.: US11636998B2Publication Date: 2023-04-25
- Inventor: Timothy Ziemba , Ilia Slobodov , John Carscadden , Kenneth Miller , Morgan Quinley
- Applicant: Eagle Harbor Technologies, Inc.
- Applicant Address: US WA Seattle
- Assignee: Eagle Harbor Technologies, Inc.
- Current Assignee: Eagle Harbor Technologies, Inc.
- Current Assignee Address: US WA Seattle
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/683 ; H01L21/687 ; H02M3/335 ; H03K3/57 ; H05K7/20 ; H03M1/12

Abstract:
Some embodiments include a high voltage pulsing power supply. A high voltage pulsing power supply may include: a high voltage pulser having an output that provides pulses with an amplitude greater than about 1 kV, a pulse width greater than about 1 μs, and a pulse repetition frequency greater than about 20 kHz; a plasma chamber; and an electrode disposed within the plasma chamber that is electrically coupled with the output of the high voltage pulser to produce a pulsing an electric field within the chamber.
Public/Granted literature
- US20210125812A1 NANOSECOND PULSER PULSE GENERATION Public/Granted day:2021-04-29
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