Invention Grant
- Patent Title: Tape expanding apparatus
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Application No.: US16445578Application Date: 2019-06-19
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Publication No.: US11637032B2Publication Date: 2023-04-25
- Inventor: Atsushi Hattori
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2018-116261 20180619
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67 ; H05K13/04

Abstract:
A tape expanding apparatus for expanding an expandable tape of a frame unit in which a workpiece is supported through the expandable tape to an annular frame includes a frame holding unit for holding the annular frame, a chuck table surrounded by the frame holding unit and having a holding surface for holding the workpiece through the expandable tape, and a position adjusting unit for adjusting a position of the workpiece with respect to the holding surface. The position adjusting unit includes a position detecting unit for detecting the position of the workpiece held on the holding surface and a position control unit having an abutting unit adapted to abut against an outer circumference of the annular frame supported by the frame holding unit and a moving mechanism for moving the abutting unit according to the position of the workpiece detected by the position detecting unit.
Public/Granted literature
- US20190385888A1 TAPE EXPANDING APPARATUS Public/Granted day:2019-12-19
Information query
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