Invention Grant
- Patent Title: Method of forming high mobility complementary metal-oxide-semiconductor (CMOS) devices with fins on insulator
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Application No.: US17131929Application Date: 2020-12-23
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Publication No.: US11637041B2Publication Date: 2023-04-25
- Inventor: Xin Miao , Chen Zhang , Kangguo Cheng , Wenyu Xu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/02 ; H01L27/12 ; H01L29/10 ; H01L29/78 ; H01L29/161 ; H01L29/20 ; H01L29/66 ; H01L29/737 ; H01L29/786

Abstract:
The subject disclosure relates to high mobility complementary metal-oxide-semiconductor (CMOS) devices and techniques for forming the CMOS devices with fins formed directly on the insulator. According to an embodiment, a method for forming such a high mobility CMOS device can comprise forming, via a first epitaxial growth of a first material, first pillars within first trenches formed within a dielectric layer, wherein the dielectric layer is formed on a silicon substrate, and wherein the first pillars comprise first portions with defects and second portions without the defects. The method can further comprise forming second trenches within a first region of the dielectric layer, and further forming second pillars within the second trenches via a second epitaxial growth of one or more second materials using the second portions of the first pillars as seeds for the second epitaxial growth.
Public/Granted literature
- US20210111195A1 HIGH MOBILITY COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) DEVICES WITH FINS ON INSULATOR Public/Granted day:2021-04-15
Information query
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