Invention Grant
- Patent Title: Method of manufacturing display panel utilizing ratio of etching removal speeds and display panel manufactured by the same
-
Application No.: US17026604Application Date: 2020-09-21
-
Publication No.: US11637167B2Publication Date: 2023-04-25
- Inventor: Gyungmin Baek , Juhyun Lee , Hongsick Park , Hyuneok Shin
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2020-0006533 20200117
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L51/56 ; H01L51/52

Abstract:
A method of manufacturing a display panel includes forming a circuit layer including a gate, a source, and a drain on a base substrate and forming a light emitting element layer on the circuit layer. The forming of the circuit layer includes sequentially forming a preliminary metal layer, a preliminary oxide layer comprising molybdenum and tantalum, and a preliminary capping layer which comprise a preliminary electrode layer, cleaning the preliminary electrode layer, forming a photoresist layer pattern on the preliminary electrode layer, etching the preliminary electrode layer, and removing the photoresist layer pattern. During the etching of the preliminary electrode layer, a ratio between a removal speed ER1 of the preliminary oxide layer and a removal speed ER2 of the preliminary metal layer satisfies Equation 1 to maintain a low reflection property 1≤ER2/ER1≤3. [Equation 1]
Public/Granted literature
- US20210225988A1 METHOD OF MANUFACTURING DISPLAY PANEL AND DISPLAY PANEL MANUFACTURED BY THE SAME Public/Granted day:2021-07-22
Information query
IPC分类: