Invention Grant
- Patent Title: Low-debris fluopolymer composite CMP polishing pad
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Application No.: US16435990Application Date: 2019-06-10
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Publication No.: US11638978B2Publication Date: 2023-05-02
- Inventor: Nan-Rong Chiou , Joseph So , Mohammad T. Islam , Matthew R. Gadinski , Youngrae Park , George C. Jacob
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent John J. Piskorski; Blake T. Biederman
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24B37/22 ; C09G1/02 ; C08F214/26 ; B24B37/005 ; C08L27/18 ; H01L21/321

Abstract:
The invention provides a polymer-polymer composite polishing pad useful for polishing or planarizing a substrate of at least one of semiconductor, optical and magnetic substrates. The polymer-polymer composite polishing pad includes a polishing layer having a polishing surface for polishing or planarizing the substrate; a polymeric matrix forming the polishing layer and including gas-filled or liquid-filled polymeric microelements; and fluoropolymer particles embedded in the polymeric matrix. The fluoropolymer particles have a tensile strength lower than the tensile strength of the polymeric matrix wherein diamond abrasive materials cut the fluoropolymer to form a reduced number of pad debris particles in the 1 μm to 10 μm size range.
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