Invention Grant
- Patent Title: Deposit removing device and deposit removing method
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Application No.: US17620559Application Date: 2020-05-28
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Publication No.: US11639560B2Publication Date: 2023-05-02
- Inventor: Fukuo Ogawa , Takuya Yotsui , Koichi Maegawa
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2019-115806 20190621
- International Application: PCT/JP2020/021251 WO 20200528
- International Announcement: WO2020/255674 WO 20201224
- Main IPC: B08B9/035
- IPC: B08B9/035 ; C30B35/00 ; C30B29/06 ; C30B13/00 ; C30B15/00

Abstract:
A deposit removing device disclosed herein removes a deposit that adheres to an exhaust pipe through which gas is exhausted from a chamber that manufactures a semiconductor crystal. The deposit removing device includes: a valve that opens and closes an exhaust outlet that communicates with the exhaust pipe; a sealing cover and a fixed table configured to store the valve, into which an inert gas is introduceable, and configured to isolate the exhaust outlet from the outside; and an exhaust outlet opening/closing portion that includes a cylinder for driving the valve and a cylinder for driving the sealing cover or the fixed table. The cylinder drives the valve to open and close the exhaust outlet, and the cylinder drives the sealing cover or the fixed table to introduce the atmosphere into the sealing cover.
Public/Granted literature
- US20220267929A1 DEPOSIT REMOVING DEVICE AND DEPOSIT REMOVING METHOD Public/Granted day:2022-08-25
Information query
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